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Noble Alloy Swing Check IOM Guide
User manual for Noble Alloy Swing Check IOM
Here is the user manual for Noble Alloy Swing Check IOM. You can read and download this user guide for free. User's manual, provided by the manufacturer, allows you to use properly your home appliances and electronics.
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Table of contents
Document Outline
Title Page
Trademarks
Disclaimer
Copyright
Warranty
Table Of Contents
Chapter 1 Introduction and Specifications
1.1 Introduction
1.2 Definition of Notes, Cautions and Warnings
1.3 How to Contact INFICON
1.3.1 Returning the UHV Bakeable Sensor to INFICON
1.4 Unpacking and Inspection
1.4.1 UHV Bakeable Sensor Configuration Overview and Parts
1.5 Specifications for the UHV Bakeable Sensor
1.5.1 UHV Bakeable Sensor without Shutter (PN BK-A0F)
1.5.2 UHV Bakeable Sensor with Shutter (PN BK-A1F)
1.5.3 Materials
1.5.4 Installation Requirements
1.6 UHV Bakeable Sensor Drawings
Chapter 2 UHV Bakeable Sensor Installation
2.1 Pre-installation Sensor Check
2.1.1 Sensor Check with XTC/3, IC6, or Cygnus 2 Deposition Controller
2.1.2 Sensor Check with STM-2XM, STM-3, SQM-160, SQC-310, SQM-242, or IQM-233 Deposition Controller/Monitor
2.1.3 Sensor Check with Q-pod™ or STM-2 Deposition Monitor
2.1.4 Sensor Shutter Check
2.2 Sensor Installation Guidelines
2.3 Sensor Installation Procedure
2.3.1 Tube Bending
2.4 Providing Improved Cooling for the Sensor
Chapter 3 Solenoid Valve Assembly Installation
3.1 Introduction
3.2 Installation with the UHV Bakeable Sensor
3.3 Pneumatic Connections
3.4 Electrical Connections
Chapter 4 Maintenance and Spare Parts
4.1 General Precautions
4.1.1 Handle the Crystal with Care
4.1.2 Use the Optimum Crystal Type
4.1.3 Maintain the Temperature of the Crystal
4.1.4 Crystal Concerns when Opening the Chamber
4.2 Crystal Replacement Instructions
4.3 UHV Bakeable Sensor Maintenance
4.3.1 Adjusting the Leaf Spring
4.3.2 Cleaning the Crystal Holder
4.3.3 Adjusting the Crystal Holder Retainer Spring
4.3.4 Lubricating the Clamping Mechanism
4.3.5 Lubricating the Shutter Module
4.4 Replacement Parts and Accessories
Chapter 5 Troubleshooting
5.1 Troubleshooting Tools
5.1.1 Symptom, Cause, Remedy
5.1.2 Diagnostic Tools
5.1.2.1 PN 782-902-023 Oscillator with 5.5 MHz Test Crystal
5.1.2.2 OSC-100 Test Function
5.1.2.3 PN 761-601-G2 Crystal Sensor Emulator
5.1.2.4 XIU Test Function
5.1.3 Digital Multimeter
5.1.3.1 Electrical Isolation Check
5.1.3.2 Electrical Continuity Check
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